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Keywords:

  • 68.55.−J;
  • 68.55.Ln;
  • 73.61.Ey;
  • 81.05.Ea;
  • 81.15.Hi

Abstract

The performance of III–V nitride heterostructure bipolar transistors has been limited by highly resistive p-type layers, in addition to difficulties associated with a precise p–n junction placement at the emitter-base heterojunction due to the Mg-memory effect during growth by Metal-Organic Chemical Vapor Deposition. The problem of precise p–n heterojunction placement can be solved by Molecular Beam Epitaxy growth. To investigate this possibility, in this work, we present a comprehensive study of the effect of III/V ratio, growth temperature, and Mg doping on the resistivity of Mg doped GaN layers grown by Molecular Beam Epitaxy. N2-rich growth conditions are found to lead to a temperature- independent low hole mobility, as opposed to Ga-rich growth conditions that lead to higher hole mobilities that vary with temperature. In addition, the growth temperature, Ga flux, and Mg flux windows leading to the highest p-type conductivity are identified. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)