Growth and characterization of gallium oxide thin films by radiofrequency magnetron sputtering
Version of Record online: 9 JUL 2008
Copyright © 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 205, Issue 8, pages 1943–1946, August 2008
How to Cite
Marie, P., Portier, X. and Cardin, J. (2008), Growth and characterization of gallium oxide thin films by radiofrequency magnetron sputtering. Phys. Status Solidi A, 205: 1943–1946. doi: 10.1002/pssa.200778856
- Issue online: 4 AUG 2008
- Version of Record online: 9 JUL 2008
- Manuscript Revised: 14 APR 2008
- Manuscript Received: 7 JUN 2007
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