Morphological, electrical and optical properties of sputtered Mo thin films on flexible substrates



Molybdenum (Mo) films were deposited onto Kapton® substrates with different thickness by dc-magnetron sputtering in order to be used as back contact layer in flexible solar cells. The morphology, electrical resistance and reflectance of the films have been studied as a function of the deposition parameters and the thickness of the polymer films. The lowest resistivity and highest reflectance have been obtained for those films deposited at a reduced working gas pressure of 0.6 Pa. The evolution of these properties is shown to be strongly dependent on the microstructure of the films. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)