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Keywords:

  • 42.70.Qs;
  • 42.79.Dj;
  • 78.67.−n;
  • 81.05.Rm;
  • 82.45.Vp

Abstract

Role of linear nucleation centres (surface grooves) in formation of macro-pores has been studied for n-type Si. It has been found that linear nucleation centres, contrary to the case of point nucleation pits, initiate formation of semi-regular pore pattern: along the grooves the pores are arranged randomly as a result of self organization process, across the grooves they follow the prescribed period a. The average distance between the pores along a groove line depends on a, and decreases as a increases. At the optimal value of etching current density and seed period a, the distinct pores can merge, thus forming a periodic structure of one-dimensional photonic crystal. Optical properties of grooved structures with merged pores have been investigated by means of Fourier infrared reflection micro-spectroscopy in the spectral range from 1.45 μm to 16.5 μm. Reflectance spectra reveal presence of photonic band gaps which positions in the middle IR range are in a good agreement with calculations by transfer matrix method. The fabrication approach developed is promising for application in silicon-based photonics. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)