Fabrication study of AlN solar-blind (<280 nm) MSM photodetectors grown by low-temperature deposition
Version of Record online: 24 AUG 2009
Copyright © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 207, Issue 1, pages 224–228, January 2010
How to Cite
Chen, M.-R., Chang, S. H., Chen, T. C., Hsu, C.-H., Kao, H. L. and Chyi, J.-I. (2010), Fabrication study of AlN solar-blind (<280 nm) MSM photodetectors grown by low-temperature deposition. Phys. Status Solidi A, 207: 224–228. doi: 10.1002/pssa.200925244
- Issue online: 7 JAN 2010
- Version of Record online: 24 AUG 2009
- Manuscript Accepted: 27 JUL 2009
- Manuscript Revised: 10 JUL 2009
- Manuscript Received: 13 MAY 2009
- Republic of China National Science Council. Grant Number: NSC 95-2221-E-033-073
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