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Keywords:

  • 68.37.−d;
  • 68.55.ag;
  • 68.65.Ac;
  • 78.30.Fs;
  • 81.07.Pr;
  • 81.15.Rs

Abstract

In this paper, the incorporation of carbon into CuInS2 (CIS) thin films is described as observed in spray ion layer gas reaction (ILGAR) deposition of such thin films. It is shown that this carbon incorporation leads to the formation of a CIS–carbon multilayer stack. Its growth mechanism is explained by the interaction of the copper and indium precursor compounds used in the deposition process.