Hydrogen implantation-induced large area exfoliation in AlN epitaxial layers
Article first published online: 15 DEC 2009
Copyright © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 207, Issue 1, pages 29–32, January 2010
How to Cite
Dadwal, U., Scholz, R., Kumar, P., Kanjilal, D., Christiansen, S., Gösele, U. and Singh, R. (2010), Hydrogen implantation-induced large area exfoliation in AlN epitaxial layers. Phys. Status Solidi A, 207: 29–32. doi: 10.1002/pssa.200982605
- Issue published online: 7 JAN 2010
- Article first published online: 15 DEC 2009
- Manuscript Accepted: 5 NOV 2009
- Manuscript Revised: 4 OCT 2009
- Manuscript Received: 21 JUN 2009
- Max Planck Society (MPS), Germany
- Department of Science and Technology (DST), India
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