Influence of annealing on structural and electrical properties of double metal structure Ru/Cu contacts on n-type InP
Article first published online: 5 OCT 2011
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 209, Issue 1, pages 105–112, January 2012
How to Cite
Devi, V. L., Jyothi, I., Reddy, V. R. and Choi, C.-J. (2012), Influence of annealing on structural and electrical properties of double metal structure Ru/Cu contacts on n-type InP. Phys. Status Solidi A, 209: 105–112. doi: 10.1002/pssa.201127394
- Issue published online: 15 DEC 2011
- Article first published online: 5 OCT 2011
- Manuscript Accepted: 12 SEP 2011
- Manuscript Revised: 18 AUG 2011
- Manuscript Received: 6 JUL 2011
- Industrial Source Technology Development Programs. Grant Number: 2009-F014-01
- Ministry of Knowledge Economy (MKE) of Korea
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