Deposition of thin films by sputtering cold isostatically pressed powder targets: A case study
Article first published online: 9 DEC 2011
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 209, Issue 3, pages 524–530, March 2012
How to Cite
Boydens, F., Leroy, W., Persoons, R. and Depla, D. (2012), Deposition of thin films by sputtering cold isostatically pressed powder targets: A case study. Phys. Status Solidi A, 209: 524–530. doi: 10.1002/pssa.201127490
- Issue published online: 27 FEB 2012
- Article first published online: 9 DEC 2011
- Manuscript Accepted: 22 NOV 2011
- Manuscript Revised: 16 NOV 2011
- Manuscript Received: 17 AUG 2011
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