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Original Paper

Optical and mechanical properties of transparent SrTiO3 thin films deposited by ECR ion beam sputter deposition

  1. Gasidit Panomsuwan1,*,
  2. Osamu Takai1,
  3. Nagahiro Saito1,2,3

Article first published online: 12 NOV 2012

DOI: 10.1002/pssa.201228077

Issue

physica status solidi (a)

physica status solidi (a)

Volume 210, Issue 2, pages 311–319, February 2013

Additional Information

How to Cite

Panomsuwan, G., Takai, O. and Saito, N. (2013), Optical and mechanical properties of transparent SrTiO3 thin films deposited by ECR ion beam sputter deposition. Phys. Status Solidi A, 210: 311–319. doi: 10.1002/pssa.201228077

Author Information

  1. 1

    Department of Materials, Physics, and Energy Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, 464-8603 Nagoya, Japan

  2. 2

    EcoTopia Science Institute, Nagoya University, Furo-cho, Chikusa-ku, 464-8603 Nagoya, Japan

  3. 3

    Green Mobility Collaborative Research, Nagoya University, Furo-cho, Chikusa-ku, 464-8603 Nagoya, Japan

*Phone: +81 52 789 5274, Fax: +81 52 789 4998

Publication History

  1. Issue published online: 15 FEB 2013
  2. Article first published online: 12 NOV 2012
  3. Manuscript Accepted: 19 OCT 2012
  4. Manuscript Revised: 10 OCT 2012
  5. Manuscript Received: 1 SEP 2012

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Keywords:

  • ion beam sputtering;
  • mechanical properties;
  • optical properties;
  • SrTiO3

Abstract

SrTiO3 (STO) thin films have been deposited on glass substrates by electron cyclotron resonance (ECR) ion beam sputter deposition at different substrate temperatures (100–600 °C). The structural characteristics of the deposited films show a transition from amorphous phase to polycrystalline phase at 600 °C. The films exhibit good transparency with an interference pattern in the visible region and a very smooth surface without cracks. The refractive index of the films increases with an increase of the substrate temperature, and their dispersion was analyzed by a single-oscillator model. The extinction coefficient of the films in the visible region is of the order of 10−3–10−2. The estimated values of the direct and indirect bandgap energies for the polycrystalline STO film are 3.80 and 3.32 eV, respectively. Its density is almost identical to the bulk STO single crystal, which is relatively high in comparison with those prepared by other techniques. The mechanical stability of the films is also improved with an increase of substrate temperature. Young's modulus and hardness of the polycrystalline STO film are 194.1 ± 15.5 and 22.5 ± 2.0 GPa, respectively.

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