Very low dose ion-implantation effect on heteroepitaxial 3C-SiC mechanical properties
Article first published online: 21 AUG 2012
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 209, Issue 11, pages 2235–2240, November 2012
How to Cite
Anzalone, R., Piluso, N., Marino, A., Sciuto, A. and D'Arrigo, G. (2012), Very low dose ion-implantation effect on heteroepitaxial 3C-SiC mechanical properties. Phys. Status Solidi A, 209: 2235–2240. doi: 10.1002/pssa.201228249
- Issue published online: 19 NOV 2012
- Article first published online: 21 AUG 2012
- Manuscript Accepted: 19 JUL 2012
- Manuscript Revised: 16 JUL 2012
- Manuscript Received: 18 APR 2012
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