Electrical characterization of liquid-phase-deposited SiON on (NH4)2S-treated GaAs
Article first published online: 13 MAY 2013
© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 210, Issue 9, pages 1762–1767, September 2013
How to Cite
Yen, C.-F., Lee, J.-C., Cheng, C.-H. and Lee, M.-K. (2013), Electrical characterization of liquid-phase-deposited SiON on (NH4)2S-treated GaAs. Phys. Status Solidi A, 210: 1762–1767. doi: 10.1002/pssa.201228592
- Issue published online: 14 SEP 2013
- Article first published online: 13 MAY 2013
- Manuscript Accepted: 5 APR 2013
- Manuscript Revised: 3 APR 2013
- Manuscript Received: 2 SEP 2012
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