Process simulation of dopant diffusion and activation in germanium
Article first published online: 5 DEC 2013
© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 211, Issue 1, pages 143–146, January 2014
How to Cite
Zographos, N. and Erlebach, A. (2014), Process simulation of dopant diffusion and activation in germanium. Phys. Status Solidi A, 211: 143–146. doi: 10.1002/pssa.201300123
- Issue published online: 21 JAN 2014
- Article first published online: 5 DEC 2013
- Manuscript Accepted: 31 OCT 2013
- Manuscript Revised: 10 JUL 2013
- Manuscript Received: 15 MAY 2013
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