Al+-doping of Si by laser ablation of Al2O3/SiN passivation
Version of Record online: 14 JUN 2013
© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 210, Issue 9, pages 1871–1873, September 2013
How to Cite
Harder, N.-P., Larionova, Y. and Brendel, R. (2013), Al+-doping of Si by laser ablation of Al2O3/SiN passivation. Phys. Status Solidi A, 210: 1871–1873. doi: 10.1002/pssa.201329058
- Issue online: 14 SEP 2013
- Version of Record online: 14 JUN 2013
- Manuscript Accepted: 14 MAY 2013
- Manuscript Revised: 7 MAY 2013
- Manuscript Received: 22 JAN 2013
- German state of Lower Saxony
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