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Keywords:

  • anti-reflective coating;
  • nanocones;
  • photodetectors;
  • ZnO

Novel ZnO nanocone anti-reflective coating (ARC) was realized on ITO-Si metal–insulator–semiconductor (MIS) photodetector. The ZnO nanocone-coated device demonstrated significant suppression of reflectance compared with that of a conventional planar device. The ZnO nanocone MIS photodetector showed a 15% enhanced external quantum efficiency (EQE) compared to a planar MIS photodetector, and indicated a flat response over a broad range of wavelength from the visible to IR spectra. In addition, the EQE of the nanocone device exhibited a stable response with respect to the angle of incidence, which indicates improved device characteristics of the ZnO nanocone ARC.