Fabrication of silicon nanostructures using metal-assisted etching in NaBF4
Article first published online: 22 JUL 2013
© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 210, Issue 10, pages 2178–2182, October 2013
How to Cite
Nguyen, N. T. P., Coffinier, Y., Thomy, V. and Boukherroub, R. (2013), Fabrication of silicon nanostructures using metal-assisted etching in NaBF4. Phys. Status Solidi A, 210: 2178–2182. doi: 10.1002/pssa.201330035
- Issue published online: 18 OCT 2013
- Article first published online: 22 JUL 2013
- Manuscript Accepted: 17 JUN 2013
- Manuscript Revised: 13 JUN 2013
- Manuscript Received: 4 JUN 2013
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