Synthesis of silicon nanopowder from silane gas by RF thermal plasma
Version of Record online: 4 OCT 2013
© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 211, Issue 2, pages 310–315, February 2014
How to Cite
So, K.-S., Lee, H., Kim, T.-H., Choi, S. and Park, D.-W. (2014), Synthesis of silicon nanopowder from silane gas by RF thermal plasma. Phys. Status Solidi A, 211: 310–315. doi: 10.1002/pssa.201330059
- Issue online: 14 FEB 2014
- Version of Record online: 4 OCT 2013
- Manuscript Accepted: 6 SEP 2013
- Manuscript Revised: 28 AUG 2013
- Manuscript Received: 21 JUN 2013
- World Class 300 Project 10043264 Ministry of Knowledge Economy (MKE, Korea)
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