Atomic layer deposition of scandium-based oxides
Article first published online: 27 NOV 2013
© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 211, Issue 2, pages 409–415, February 2014
How to Cite
Nyns, L., Lisoni, J. G., Van den Bosch, G., Van Elshocht, S. and Van Houdt, J. (2014), Atomic layer deposition of scandium-based oxides. Phys. Status Solidi A, 211: 409–415. doi: 10.1002/pssa.201330080
- Issue published online: 14 FEB 2014
- Article first published online: 27 NOV 2013
- Manuscript Accepted: 16 OCT 2013
- Manuscript Revised: 27 SEP 2013
- Manuscript Received: 28 JUN 2013
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