Young's modulus extraction of epitaxial heterostructure AlGaN/GaN for MEMS application
Article first published online: 2 MAY 2014
© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (a)
Volume 211, Issue 7, pages 1655–1659, July 2014
How to Cite
Ben Amar, A., Faucher, M., Brandli, V., Cordier, Y. and Théron, D. (2014), Young's modulus extraction of epitaxial heterostructure AlGaN/GaN for MEMS application. Phys. Status Solidi A, 211: 1655–1659. doi: 10.1002/pssa.201330339
- Issue published online: 9 JUL 2014
- Article first published online: 2 MAY 2014
- Manuscript Accepted: 26 MAR 2014
- Manuscript Revised: 13 MAR 2014
- Manuscript Received: 4 OCT 2013
- French National Agency (ANR). Grant Number: ANR-08-NANO-023
- Région Nord-Pas de Calais
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