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Double-layer effect on electrothermal properties of transparent heaters

Authors

  • A-Young Kim,

    1. Center for Energy Convergence Research, Green City Research Institute, Korea Institute of Science and Technology, Seongbuk-gu, Seoul, Republic of Korea
    2. Department of Material Science and Engineering, Korea University, Seoul, Republic of Korea
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  • Kyuha Lee,

    1. Center for Energy Convergence Research, Green City Research Institute, Korea Institute of Science and Technology, Seongbuk-gu, Seoul, Republic of Korea
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  • Ji Hun Park,

    1. Center for Energy Convergence Research, Green City Research Institute, Korea Institute of Science and Technology, Seongbuk-gu, Seoul, Republic of Korea
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  • Dongjin Byun,

    1. Department of Material Science and Engineering, Korea University, Seoul, Republic of Korea
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  • Joong Kee Lee

    Corresponding author
    1. Center for Energy Convergence Research, Green City Research Institute, Korea Institute of Science and Technology, Seongbuk-gu, Seoul, Republic of Korea
    • Corresponding author: e-mail leejk@kist.re.kr, Phone: +82 10 8717 0978, Fax: +82 2 958 5229

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Abstract

Transparent double-layer heaters that consist of aluminum-doped zinc oxide and fluorine-doped tin oxide films are prepared by electron cyclotron resonance-metal organic chemical vapor deposition and RF-sputtering systems, in sequence. The double-layered transparent conducting oxide film is designed and prepared to achieve both of high conductivity and high-temperature performance. This double-layer structure has lower sheet resistance, due to the grain size increase with respect to the single-layer films. The fluorine-doped tin oxide/aluminum-doped zinc oxide double-layer film shows a sheet resistance as low as 36.7 Ω sq−1, and an optical transmittance of ∼82%, which are suitable properties for low-voltage transparent heaters. Hall measurement results show that the double-layer film has remarkably increased conductivity and decreased resistivity. In addition, the time-versus-temperature profile shows that the performance of the fluorine-doped tin oxide/aluminum-doped zinc oxide double layer is superior to that of the aluminum-doped zinc oxide and fluorine-doped tin oxide single-layer films.

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