Photonic crystals in lithium niobate by combining focussed ion beam writing and ion-beam enhanced etching

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Abstract

The realization of photonic crystals in self-suspended lithium niobate membranes by means of focussed ion beam writing and ion-beam enhanced etching is presented. The influence of gallium contamination is discussed and considered in the realization of a L3 photonic crystal resonator that is showing the designed linear optical response in a cross-polarization resonant scattering experiment.

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