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Keywords:

  • 61.10.Kw;
  • 61.66.Fn;
  • 68.37.Lp;
  • 81.15.Gh

Abstract

Multiple ordering has been observed both by high resolution X-ray diffraction (HRXRD) and transmission electron microscopy (TEM) in AlxGa1–xN grown by low pressure metal-organic vapor phase epitaxy (LP-MOVPE) on sapphire (0001) with x varying from 9 to 25 percent. This is shown to take place even simultaneously in the same sample; beside the disordered alloy, AlGaN2 (1:1), and Al0.25Ga0.75N (3:1), there is an additional type which a quite large unit cell. In the latter, the c parameter is six times larger than that of the disordered alloy. Through the analysis of X-ray diffraction data and comparison with TEM observations, a structure model is proposed. Taking into account the super-lattice reflections intensity and symmetry, we conclude that this ordered phase contains two consecutive AlN monolayers in the 3.1 nm unit cell that corresponds to Al0.16Ga0.84N (10:2).