SEARCH

SEARCH BY CITATION

Keywords:

  • 77.22.Ch;
  • 78.20.Ci;
  • 78.40.Fy

Abstract

We discuss various aspects of the characterization of optically anisotropic materials by spectroscopic ellipsometry (SE) and reflectance-difference/anisotropy-spectroscopy (RDS/RAS). The main focus is on the limitation of quantitative analysis, and will be discussed in detail for two different examples: group-III-nitride layers and ZnO. We suggest that a combination of SE and RDS is a good choice to determine the components of the dielectric tensor (here ε, ε) and allows also to determine important parameters such as thickness or sample orientation. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)