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Scanning thermal microscopy: A nanoprobe technique for studying the thermal properties of nanocomponents

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  • Dedicated to Dieter Schmeißer on the occasion of his 60th birthday

Abstract

In this paper, a novel micromachined scanning thermal microscopy (SThM) microcantilever with a sharp, conductive platinum tip is proposed for temperature and thermal conductivity measurements in sub-micron structures of micro- and nanoelectronic components. The idea and physical background of SThM operation is presented, together with brief description of probes and example images of a planar polycrystalline-silicon microfuse obtained using passive- and active-mode SThM.

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