• incorporation efficiency;
  • photoluminescence;
  • polarity;
  • pulsed laser deposition;
  • sticking coefficient

In this study, we investigated the influence of polarity on Mg incorporation in ZnO films grown using pulsed laser deposition. The photoluminescence (PL) measurements of (Zn,Mg)O films grown on the c(+) and c(−) faces of ZnO revealed that the peak position of the near-band-edge emission for the films on the c(−)-face was at a shorter wavelength than that for the films on the c(+)-face. This result indicates that the Mg content in the films on the c(−)-face is higher than that for the films on the c(+)-face regardless of the same growth conditions used, except for the polarity of the substrates. This difference in the Mg content in the c(+)- and c(−)-polar films can result from the difference in the value of the sticking coefficients for Zn atoms on the c(+)- and c(−)-faces. We also demonstrated that polarity determination can be possible by (Zn,Mg)O film deposition followed by PL mapping measurement.