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Keywords:

  • CNT;
  • Langmuir probe;
  • nanocrystalline diamond;
  • plasma enhanced CVD;
  • Raman spectroscopy;
  • SEM

The versatility of linear antenna microwave plasma system, growth of diamond films with variable grain sizes, and efficient synthesis of oriented carbon nanotubes when combined with radiofrequency substrate bias were studied. Grown diamond films and carbon nanotubes are characterized by Raman spectroscopy and scanning electron microscopy. Successful surface functionalization of carbon nanotubes without their destruction is shown in agreement to plasma state as measured by Langmuir probe. We show that diamond growth from large to ultra-small size grains can be easily driven by total gas pressure. Langmuir probe measurements indicate low electron effective energy at substrate position and higher ion energy at the lowest total gas pressure.