Thin film deposition of complex chalcogenide gradient layers by sputtering methods



In ternary chalcogenide systems, a lateral compositional gradient in deposited layers could help to reduce the experimental efforts drastically. At present, no sputtering method for these sulfosalt gradient layers is described. A method was developed to deposit ternary (SnS)x(Bi2S3)1-x gradient layers by sputtering methods. Therefore, binary SnS and Bi2S3 sputter targets were prepared by uniaxial hot pressing. Halved targets were bonded together to form composite SnS/Bi2S3-targets. Layer deposition was carried out on up to 50x100 mm2 glass and glass/Mo substrates using different sputter parameters and substrate temperatures. The (SnS)x(Bi2S3)1-x gradient layers were characterised by microprobe, X-ray diffraction, and UV/Vis/NIR spectrometry. The composition of the layers is determined laterally and the film structure and optical properties were correlated via the substrate coordinates. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)