Contributed Article

Preparation and electrical characterization of amorphous BaO, SrO and Ba0.7Sr0.3O as high-k gate dielectrics

  1. D. Müller-Sajak1,
  2. A. Cosceev2,
  3. C. Brand1,
  4. K. R. Hofmann2,
  5. H. Pfnür1,*

Article first published online: 8 DEC 2009

DOI: 10.1002/pssc.200982477

Issue

physica status solidi (c)

physica status solidi (c)

Special Issue: 12th International Conference on the Formation of Semiconductor Interfaces (ICFSI-12)

Volume 7, Issue 2, pages 316–320, February 2010

Additional Information

How to Cite

Müller-Sajak, D., Cosceev, A., Brand, C., Hofmann, K. R. and Pfnür, H. (2010), Preparation and electrical characterization of amorphous BaO, SrO and Ba0.7Sr0.3O as high-k gate dielectrics. Phys. Status Solidi C, 7: 316–320. doi: 10.1002/pssc.200982477

Author Information

  1. 1

    Institut für Festkörperphysik, Leibniz Universität Hannover, Appelstr. 2, 30167 Hannover, Germany

  2. 2

    Institut für Materialien und Bauelemente der Elektronik, Leibniz Universität Hannover, Appelstr. 11A, 30167 Hannover, Germany

*Phone: +49-511-7624819, Fax: +49-511-7624877

Publication History

  1. Issue published online: 10 FEB 2010
  2. Article first published online: 8 DEC 2009
  3. Manuscript Accepted: 6 OCT 2009
  4. Manuscript Revised: 24 SEP 2009
  5. Manuscript Received: 6 JUL 2009

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Keywords:

  • 73.40.Qv;
  • 77.55.+f;
  • 81.05.Gc

Abstract

We report on the measurement of band offsets and electrical characterizations of amorphous BaO, SrO and Ba0.7Sr0.3O as alternative gate oxides grown on n-Si(001) at room temperature without further treatments. These materials provide relative dielectric constants close to those expected from bulk values even for ultra-thin films (equivalent oxide thicknesses below 1 nm) and posess very low rechargeable trap densities. Interface defect densities are comparable to other high-k materials for BaO and SrO films, but an order of magnitude lower for Ba0.7Sr0.3O. This demonstrates the importance of both chemical and structural interface effects (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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