• EBIC;
  • charge collection;
  • electron-beam application;
  • generation function;
  • electron penetration


The question concerning the best electron range to use with uniform generation function to get the best fit of the experimental data is answered by describing a general strategy to extract an effective electron range. This strategy is based on EBIC charge collect efficiency and on EBIC normal collector geometry. The results show that the disagreement between the EBIC signal modelled with the Gaussian generation form with Kyser electron range and that modelled with uniform generation with the extracted electron range is disappeared. The result shows also that the modelled EBIC signal for the case of uniform generation is independent of the shape of generation volume. The fit of the experimental data of charge collection efficiency, stalking fault contrast and grain boundaries contrast using the extracted electron range is illustrated. The use of the extracted electron range can remove some existing disagreement in extraction of the diffusion length value from different existing models (© 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)