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Keywords:

  • InN;
  • MOVPE;
  • X-ray diffraction;
  • anomalous atomic dispersion

Abstract

Twin formation of {10equation image3} semi-polar InN layers on GaAs(110) surface has been investigated by metalorganic vapor phase epitaxy (MOVPE). It was found that the growth temperature of InN epitaxial layer strongly affected the twin formation due to the difference in the durability of In-polar and N-polar InN crystal at each growth temperature. From the results of polarity determination and pole figure measurements by high resolution X-ray diffraction (HR-XRD), InN layers grown at high temperatures showed a single domain (no twinning) and the direction of 〈0001〉 InN paralleled to the direction of 〈11equation image〉B GaAs, implying the epitaxial relationship to be (10equation imageequation image)//GaAs(110). On the contrary, InN layers grown at relatively low temperatures contained the twin crystal and the [0001] InN of each domain paralleled to either 〈111〉A or 〈11equation image〉B of GaAs. (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)