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Keywords:

  • InN;
  • MOVPE;
  • catalyst;
  • migration

Abstract

This paper reports on the catalyst-assisted metal-organic vapor phase epitaxy (CA-MOVPE) growth of InN with an independent control of catalyst temperature. When the catalyst temperature is increased above the growth temperature of InN, the grain size becomes large and full width at half maximum (FWHM) of X-ray rocking curve (XRC) is drastically decreased The migration of precursors is highly enhanced and the crystal quality is improved by CA-MOVPE with an independent heating system of the catalyst. This CA-MOVPE system will open the possibility of the growth of high-quality InN and In containing alloys especially with the higher In content (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)