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Keywords:

  • porous alumina;
  • nanocrystalline silicon;
  • photothermal deflection spectroscopy

Abstract

The goal of this work is to investigate the influence of the anodization current on the optical properties of porous alumina layer, on which crystalline silicon films are deposited by a PECVD technique. Porous alumina layers were grown by a simple electrochemical anodization method, varying the anodizing voltage between 200 to 400 mV.

The structural properties of the Si/Al2O3 films were studied by using Raman spectroscopy and XRD. Photothermal deflection spectroscopy (PDS) is used to determine the gap energy and the optical absorption spectrum by comparing the experimental amplitude of the photothermal signal to the corresponding theoretical one (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)