Mechanical grooving of oxidized porous silicon to reduce the reflectivity of monocrystalline silicon solar cells

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Abstract

In this work, we are interested to use oxidized porous silicon (ox–PS) as a mask. So, we display the creating of a rough surface which enhances the absorption of incident light by solar cells and reduces the reflectivity of monocrystalline silicon (c–Si). It clearly can be seen that the mechanical grooving enables us to elaborate the texturing of monocrystalline silicon wafer. Results demonstrated that the application of a PS layer followed by a thermal treatment under O2 ambient easily gives us an oxide layer of uniform size which can vary from a nanometer to about ten microns. In addition, the Fourier transform infrared (FTIR) spectroscopy investigations of the PS layer illustrates the possibility to realize oxide layer as a mask for porous silicon. We found also that this simple and low cost method decreases the total reflectivity (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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