Anisotropy antireflection TiO2 nanoparticle films fabricated with directed cluster beam deposition

Authors

  • Peng Mao,

    1. National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P.R. China
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  • Jinhui Chen,

    1. National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P.R. China
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  • Yang Zhou,

    1. National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P.R. China
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  • Kaiming Liao,

    1. National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P.R. China
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  • Bo Zhao,

    1. National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, P.R. China
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  • Junhao Han,

    1. National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P.R. China
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  • Guanghou Wang,

    1. National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, P.R. China
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  • Min Han

    Corresponding author
    1. National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P.R. China
    • Phone: +86-25-83686248, Fax: +86-25-83686248===

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Abstract

Antireflection TiO2 nanoparticle film was fabricated on silica glass substrate by using directed cluster beam deposition method. Self-shadowing becomes a dominant growth mechanism for nanoparticle deposition at sufficiently large incident angles, which results in extremely porous nanoparticle stacking and yields excellent control over the refractive index profile. Inclined columnar and porous microstructure was confirmed with SEM and AFM. The TiO2 nanoparticle films show ultra-high transmittance, broadband and omnidirectional characters, which can be attributed to its porous structure and modulated refractive index. We also found that the film displays an angular selective optical transmittance. The highest antireflection enhancement of the light transmission can be obtained for light incidence along the nanoparticle columns. (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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