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Keywords:

  • silicon;
  • plasticity;
  • micropillars

Abstract

Silicon micropillars obtained by FIB from Floating Zone silicon single crystal have been deformed in situ in a SEM between room temperature and 400 °C. Pillars with <123> axis were studied in order to promote single slip deformation. Mechanical data as a function of pillar diameter and surface deformation microstructures observed by SEM are reported. Yield stresses as a function of temperature are compared with those resulting from high-pressure tests (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)