Silicon micropillars: high stress plasticity



Silicon micropillars obtained by FIB from Floating Zone silicon single crystal have been deformed in situ in a SEM between room temperature and 400 °C. Pillars with <123> axis were studied in order to promote single slip deformation. Mechanical data as a function of pillar diameter and surface deformation microstructures observed by SEM are reported. Yield stresses as a function of temperature are compared with those resulting from high-pressure tests (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)