Room temperature operation of ITO nano-crystal gas sensor

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Abstract

We proposed an indium-tin-oxide (ITO) based gas sensor which can operate at room temperature. ITO nano-crystal was screen printed on a quartz substrate. To improve the sensitivity and to decrease the resistivity of the printed ITO layer, pressurized annealing was adopted. Resistivity of the printed ITO gas sensor decreased from 3.5 kΩcm to 1.56 Ωcm by pressurized annealing. We could observe room temperature operation of the printed ITO gas sensor by using various gases such as Ar, N2, O2 and CH4. (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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