Role of the early stages of Ni-Si interaction on the formation of transrotational Ni-silicides

Authors

  • Alessandra Alberti,

    Corresponding author
    1. National Research Council, Institute for Microelectronics and Microsystems (CNR-IMM), Zona Industriale, Strada VIII n°5, 95121 Catania, Italy
    • National Research Council, Institute for Microelectronics and Microsystems (CNR-IMM), Zona Industriale, Strada VIII n°5, 95121 Catania, Italy===

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  • Corrado Bongiorno,

    1. National Research Council, Institute for Microelectronics and Microsystems (CNR-IMM), Zona Industriale, Strada VIII n°5, 95121 Catania, Italy
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  • Corrado Spinella,

    1. National Research Council, Institute for Microelectronics and Microsystems (CNR-IMM), Zona Industriale, Strada VIII n°5, 95121 Catania, Italy
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  • Antonino La Magna

    1. National Research Council, Institute for Microelectronics and Microsystems (CNR-IMM), Zona Industriale, Strada VIII n°5, 95121 Catania, Italy
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Abstract

Here we provide an overview on the crucial role played by the early stages of Ni-Si interaction on the reaction process and on the scalability of the reaction products. During the early stages, a precursor layer (a Ni-Si mixed layer) is formed at the deposition stage, whose properties can be tuned in a proper and convenient way. With this method, transrotational Ni-silicide layers can be formed on [001] silicon substrate in a wide range of conditions. A transrotational structure represents an alternative order status possible for thin films allowing them to release the strain accumulated in the attempt to realise a hetero-epitaxial couplings with the substrate. Transrotational layers offer wide reaction and structural stability windows as well as a good electrical behaviour. Their scalability down to 14 nm was tested, and it was verified that the layer performances are even preserved if compared to reference poly-thick layers (e. g. uniformity, structural stability, layer conductivity, low contact resistance). (© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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