Simulation of the boron build-up formation during melting laser thermal annealing



In this work, we present a model describing the boron redistribution during laser thermal annealing in the melting regime based on the adsorption of boron atoms at the solid-liquid interface. To validate the model, we performed SIMS measurements on silicon samples implanted with boron with an energy of 3 keV and doses of 3 × 1013 cm-2 and 4 × 1014 cm-2 annealed with a XeCl excimer laser with a wavelength of 308 nm, a pulse duration of 160 ns, and up to 10 consecutive pulses. After calibration, our model is able to reproduce the measured profiles for the different process conditions. (© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)