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Keywords:

  • avalanche photodiode;
  • dark count rate;
  • Geiger-mode avalanche photodiode;
  • single photon detection

Abstract

In this paper, we compare the performances of wet-etched and dry-etched Geiger-mode avalanche photodiodes (GM-APDs) using a single diffusion process at a wavelength of 1.55-µm. The single-diffused GM-APD based on a wet recess-etching has demonstrated the good performances of a dark count rate of 0.03 kHz/µm2 and a photon detection efficiency of 17.1% at 240 K. (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)