Fabrication and characterization of VCSELs applying quantum well intermixing using spin-on-glass



The applicability of the quantum well intermixing using a spin-on-glass (SOG) to the fabrication process of a vertical cavity surface emitting laser (VCSEL) was investigated to control the carrier confinement in the active layer. The intermixing by using the non-doped SOG showed a large emission energy shift. The SOG coating of the mesa side-wall of the VCSEL and following heat-treatment are simple processes that can add to the conventional one. The fabricated VCSELs with a 30 μm-square mesa showed lasing operation, and therefore the technique can be applicable as the VCSEL process for improving the performance of the small mesa devices. (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)