Rapid Research Letter
Patterned deposition by plasma enhanced spatial atomic layer deposition
Article first published online: 30 MAR 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
physica status solidi (RRL) - Rapid Research Letters
Volume 5, Issue 4, pages 165–167, April 2011
How to Cite
Poodt, P., Kniknie, B., Branca, A., Winands, H. and Roozeboom, F. (2011), Patterned deposition by plasma enhanced spatial atomic layer deposition. Phys. Status Solidi RRL, 5: 165–167. doi: 10.1002/pssr.201004542
- Issue published online: 12 APR 2011
- Article first published online: 30 MAR 2011
- Manuscript Accepted: 29 MAR 2011
- Manuscript Revised: 28 MAR 2011
- Manuscript Received: 28 DEC 2010
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