Effects of Mn-doping on surface acoustic wave properties of ZnO films

Authors

  • J. T. Luo,

    Corresponding author
    1. College of Physical Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, Shenzhen 518060, P.R. China
    2. Shenzhen Key Laboratory of Sensor Technology, Shenzhen 518060, P.R. China
    • Phone: +86-755-26538974, Fax: +86-755-26538735
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  • P. Fan,

    1. College of Physical Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, Shenzhen 518060, P.R. China
    2. Shenzhen Key Laboratory of Sensor Technology, Shenzhen 518060, P.R. China
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  • F. Pan,

    1. Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, P.R. China
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  • F. Zeng,

    1. Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, P.R. China
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  • D. P. Zhang,

    1. College of Physical Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, Shenzhen 518060, P.R. China
    2. Shenzhen Key Laboratory of Sensor Technology, Shenzhen 518060, P.R. China
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  • Z. H. Zheng,

    1. College of Physical Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, Shenzhen 518060, P.R. China
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  • G. X. Liang,

    1. College of Physical Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, Shenzhen 518060, P.R. China
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  • X. M. Cai

    1. College of Physical Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, Shenzhen 518060, P.R. China
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Abstract

Surface acoustic wave (SAW) filters based on Mn-doped ZnO films have been fabricated and effects of Mn-doping on SAW properties are investigated. It is found that the electromechanical coupling coefficient (K2) of Zn0.913Mn0.087O films is 0.73 ± 0.02%, which is 73.8% larger than that of undoped ZnO films (0.42 ± 0.02%). Zn0.913Mn0.087O film filters also exhibit a lower absolute value of insertion loss (|IL|) of 16.1 dB and larger bandwidth (BW) of 5.9 MHz compared with that of undoped ZnO film filter. However, Zn0.952Mn0.048O film filters exhibit a smaller K2 of 0.34 ± 0.02%, larger |IL| of 26.9 dB and smaller BW of 3.5 MHz. It is suggested that the SAW properties can be improved by appropriate Mn-doping and Mn–ZnO/Si multilayer structure with large d33 is promising for wide-band and low-loss SAW applications. (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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