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Keywords:

  • Ge2Sb2Te5;
  • molecular beam epitaxy;
  • GIXRD;
  • RHEED;
  • HRTEM

Abstract

Epitaxial equation image thin layers were successfully grown in the metastable cubic phase on both slightly lattice-mismatched (GaSb) and highly lattice-mismatched (Si) templates. The higher quality of the films grown on (111)-oriented substrates is attributed to the tendency to form layered structures in the stable bulk phase as well as to the nature of distortion in the metastable cubic phase. (© 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)