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Keywords:

  • tantalum oxide;
  • plasma oxidation;
  • resistive switching;
  • nonvolatile memory

Abstract

We investigate the resistive switching behaviour of a tantalum oxide nanolayer-based nonvolatile memory with Pt/TaO5–x/TaN structure, which was prepared at room temperature through a processing compatible with CMOS technology. The tantalum oxide nanolayer with thickness of about 5 nm was fabricated by plasma oxidation of TaN films. The switching mechanism can be explained by the modulation of the local oxygen-deficient conduction channel resulting from oxygen ions drift. This Letter represents a cost-efficient method for developing nanoscale restive switching nonvolatile memories. (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)