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Calibration of excitonic photoluminescence to determine high aluminum concentrations in silicon



The photoluminescence spectroscopy method for determining the concentration of shallow acceptors or donors in silicon is extended for the case of aluminum. A calibration function of the photoluminescence intensity ratio of the aluminum bound exciton AlTO(BE) and the free exciton ITO(FE) is reported in the aluminum concentration range of 1015–1017 atoms/cm3 and in the temperature range of 15 K < T < 27 K. It is described as AlTO(BE)/ITO( FE) = 10–15.1 × cAl0.84 × e5.9meV/kT.

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Dependence of the PL intensity ratio AlTO(BE)/ITO(FE) on the aluminum concentration. The line represents the calibration function. (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)