The photoluminescence spectroscopy method for determining the concentration of shallow acceptors or donors in silicon is extended for the case of aluminum. A calibration function of the photoluminescence intensity ratio of the aluminum bound exciton AlTO(BE) and the free exciton ITO(FE) is reported in the aluminum concentration range of 1015–1017 atoms/cm3 and in the temperature range of 15 K < T < 27 K. It is described as AlTO(BE)/ITO( FE) = 10–15.1 × cAl0.84 × e5.9meV/kT.
Dependence of the PL intensity ratio AlTO(BE)/ITO(FE) on the aluminum concentration. The line represents the calibration function. (© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)