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Silicon nanowires – a versatile technology platform

Authors

  • Thomas Mikolajick,

    Corresponding author
    1. NaMLab GmbH, 01187 Dresden, Germany
    2. Institute of Semiconductor and Microsystems, TU Dresden, 01187 Dresden, Germany
    3. Center for Advancing Electronics Dresden (CfAED), TU Dresden, 01062 Dresden, Germany
    • Phone: +49 351 21 24 990-20, Fax: +49 351 475 83 900

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  • André Heinzig,

    1. Institute of Semiconductor and Microsystems, TU Dresden, 01187 Dresden, Germany
    2. Center for Advancing Electronics Dresden (CfAED), TU Dresden, 01062 Dresden, Germany
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  • Jens Trommer,

    1. NaMLab GmbH, 01187 Dresden, Germany
    2. Center for Advancing Electronics Dresden (CfAED), TU Dresden, 01062 Dresden, Germany
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  • Sebastian Pregl,

    1. NaMLab GmbH, 01187 Dresden, Germany
    2. Institute for Material Science, TU Dresden, 01062 Dresden, Germany
    3. Center for Advancing Electronics Dresden (CfAED), TU Dresden, 01062 Dresden, Germany
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  • Matthias Grube,

    1. NaMLab GmbH, 01187 Dresden, Germany
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  • Gianaurelio Cuniberti,

    1. Institute for Material Science, TU Dresden, 01062 Dresden, Germany
    2. Center for Advancing Electronics Dresden (CfAED), TU Dresden, 01062 Dresden, Germany
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  • Walter M. Weber

    1. NaMLab GmbH, 01187 Dresden, Germany
    2. Center for Advancing Electronics Dresden (CfAED), TU Dresden, 01062 Dresden, Germany
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Abstract

original image

Silicon nanowires offer unique properties like inherent small diameters, quasi-one-dimensional current transport and the flexibility to combine materials that cannot be combined in bulk or thin film structures. Based on these properties electron devices, sensors as well as solar cells and lithium batteries can be envisioned that significantly outperform their thin film or bulk counterparts. The possibility to form silicon nanowires in a top–down process using bulk silicon or silicon-on-insulator substrates, gives this technology the potential for a seamless integration into integrated electronic systems. This Review gives an overview of important device applications of silicon nanowires. Starting with nanowire fabrication, the different device concepts will be introduced and their most important features are reported.

original image

Illustration of silicon nanowire formation and application in a reconfigurable device.

(© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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