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Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2 films on TiN bottom and TiN or RuO2 top electrodes

Authors

  • Min Hyuk Park,

    1. Department of Material Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Republic of Korea
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  • Han Joon Kim,

    1. Department of Material Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Republic of Korea
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  • Yu Jin Kim,

    1. Department of Material Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Republic of Korea
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  • Woojin Jeon,

    1. Department of Material Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Republic of Korea
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  • Taehwan Moon,

    1. Department of Material Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Republic of Korea
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  • Cheol Seong Hwang

    Corresponding author
    1. Department of Material Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Republic of Korea
    • Department of Material Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 151-744, Republic of Korea===

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Abstract

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The effect of the top electrode (TE) on the ferroelectric properties and switching endurance of thin Hf0.5Zr0.5O2 films was examined. The TiN/Hf0.5Zr0.5O2/TiN capacitor can endure electric cycling up to 109 times, which is promising for the next-generation memory. RuO2 TE was reduced during annealing due to the reactive TiN bottom electrode, resulting in the degradation of the ferroelectric properties and endurance. In addition, the endurance of the TiN/Hf0.5Zr0.5O2/TiN capacitors was optimized by changing the film thickness and the postannealing temperature. (© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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