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Special Issue Article
Variability in measurements of micro lengths with a white light interferometer
Article first published online: 25 JAN 2008
DOI: 10.1002/qre.903
Copyright © 2008 John Wiley & Sons, Ltd.
Issue
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Quality and Reliability Engineering International
Special Issue: Sixth International Conference on Quality Reliability and Maintenance
Volume 24, Issue 8, pages 881–890, December 2008
Additional Information
How to Cite
Ferri, C. and Brousseau, E. (2008), Variability in measurements of micro lengths with a white light interferometer. Quality and Reliability Engineering International, 24: 881–890. doi: 10.1002/qre.903
Publication History
- Issue published online: 23 JAN 2009
- Article first published online: 25 JAN 2008
- Manuscript Accepted: 23 NOV 2007
- Manuscript Received: 1 OCT 2007
- Abstract
- References
- Cited By
Keywords:
- random effects ANOVA;
- linear mixed models;
- white light interferometry;
- WLI;
- uncertainty;
- gauge capability analysis
Abstract
The effect of the discretionary set-up parameters scan length and initial scanner position on the measurements of length performed with a white light interferometer microscope was investigated. In both analyses, two reference materials of nominal lengths 40 and 200 µm were considered. Random effects and mixed effects models were fitted to the data from two separate experiments. Punctual and interval estimates of variance components were provided. Copyright © 2008 John Wiley & Sons, Ltd.