Enhanced surface sensitivity in secondary ion mass spectrometric analysis of organic thin films using size-selected Ar gas-cluster ion projectiles
Article first published online: 15 APR 2010
Copyright © 2010 John Wiley & Sons, Ltd.
Rapid Communications in Mass Spectrometry
Volume 24, Issue 10, pages 1405–1410, 30 May 2010
How to Cite
Tanaka, M., Moritani, K., Hirota, T., Toyoda, N., Yamada, I., Inui, N. and Mochiji, K. (2010), Enhanced surface sensitivity in secondary ion mass spectrometric analysis of organic thin films using size-selected Ar gas-cluster ion projectiles. Rapid Commun. Mass Spectrom., 24: 1405–1410. doi: 10.1002/rcm.4529
- Issue published online: 28 APR 2010
- Article first published online: 15 APR 2010
- Manuscript Accepted: 26 FEB 2010
- Manuscript Revised: 25 FEB 2010
- Manuscript Received: 5 JAN 2010
A size-selected argon (Ar) gas-cluster ion beam (GCIB) was applied to the secondary ion mass spectrometry (SIMS) of a 1,4-didodecylbenzene (DDB) thin film. The samples were also analyzed by SIMS using an atomic Ar+ ion projectile and X-ray photoelectron spectroscopy (XPS). Compared with those in the atomic-Ar+ SIMS spectrum, the fragment species, including siloxane contaminants present on the sample surface, were enhanced several hundred times in the Ar gas-cluster SIMS spectrum. XPS spectra during beam irradiation indicate that the Ar GCIB sputters contaminants on the surface more effectively than the atomic Ar+ ion beam. These results indicate that a large gas-cluster projectile can sputter a much shallower volume of organic material than small projectiles, resulting in an extremely surface-sensitive analysis of organic thin films. Copyright © 2010 John Wiley & Sons, Ltd.