Dual-beam versus single-beam depth profiling: Same sample in same instrument

Authors

  • S. V. Baryshev,

    Corresponding author
    1. Materials Science Division, Argonne National Laboratory, Argonne, IL, USA
    • Correspondence to: S. V. Baryshev, Materials Science Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, IL 60439, USA.

      E-mail: sergey.v.baryshev@gmail.com

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    • Current address: Euclid TechLabs LLC, 5900 Harper Rd., Solon, OH 44139, USA; and High Energy Physics Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, IL 60439, USA.
  • N. G. Becker,

    1. Materials Science Division, Argonne National Laboratory, Argonne, IL, USA
    2. Department of Physics, Illinois Institute of Technology, Chicago, IL, USA
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  • A. V. Zinovev,

    1. Materials Science Division, Argonne National Laboratory, Argonne, IL, USA
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  • C. E. Tripa,

    1. Materials Science Division, Argonne National Laboratory, Argonne, IL, USA
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  • I. V. Veryovkin

    1. Materials Science Division, Argonne National Laboratory, Argonne, IL, USA
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